HIGHLY ORIENTED ZNO FILMS OBTAINED BY DC REACTIVE SPUTTERING OF A ZINC TARGET

被引：57

作者：

PETROV, I ^{[1
]}

ORLINOV, V ^{[1
]}

MISIUK, A ^{[1
]}

机构：

[1] WROCLAW TECH UNIV,INST ELECTR TECHNOL,PL-50370 WROCLAW,POLAND

来源：

THIN SOLID FILMS | 1984年 / 120卷 / 01期

关键词：

D O I：

10.1016/0040-6090(84)90173-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

ZINC COMPOUNDS

引用

页码：55 / 67

页数：13

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