PREPARATION AND PROPERTIES OF TIN-DOPED INDIUM OXIDE THIN-FILMS BY THERMAL-DECOMPOSITION OF ORGANOMETALLIC COMPOUNDS

被引：22

作者：

FURUSAKI, T

KODAIRA, K

YAMAMOTO, M

SHIMADA, S

MATSUSHITA, T

机构：

来源：

MATERIALS RESEARCH BULLETIN | 1986年 / 21卷 / 07期

关键词：

D O I：

10.1016/0025-5408(86)90165-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：803 / 806

页数：4

共 10 条

[1] TIN-DOPED IN2O3 FILMS DEPOSITED BY RF-SPUTTERING [J].

FUJINAKA, M ;

BEREZIN, AA .

THIN SOLID FILMS, 1983, 101 (01) :7-10

[2] PREPARATION OF FERROELECTRIC PZT FILMS BY THERMAL-DECOMPOSITION OF ORGANOMETALLIC COMPOUNDS [J].

FUKUSHIMA, J ;

KODAIRA, K ;

MATSUSHITA, T .

JOURNAL OF MATERIALS SCIENCE, 1984, 19 (02) :595-598

[3] PROPERTIES OF SN-DOPED INDIUM OXIDE PREPARED BY HIGH-RATE AND LOW-TEMPERATURE RF SPUTTERING [J].

ITOYAMA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (07) :1191-1196

[4] ELECTRICAL AND OPTICAL-PROPERTIES OF THIN IN2O3-SN AND SNO2-SB-IN2O3-SN FILMS OBTAINED BY THE HYDROLYSIS METHOD [J].

KULASZEWICZ, S ;

JARMOC, W ;

TUROWSKA, K .

THIN SOLID FILMS, 1984, 112 (04) :313-316

[5] FORMATION PROCESS OF ANTIMONY-DOPED STANNIC OXIDE FILM FROM ORGANOMETALLIC COMPOUNDS BY THERMAL-DECOMPOSITION [J].

MATSUSHITA, T ;

SEKIYA, T ;

YAMAI, I .

NIPPON KAGAKU KAISHI, 1972, (05) :880-+

[6] ELECTRICAL-PROPERTIES OF VACUUM-DEPOSITED INDIUM OXIDE AND INDIUM TIN OXIDE-FILMS [J].

MIZUHASHI, M .

THIN SOLID FILMS, 1980, 70 (01) :91-100

[7]

NATH P, 1980, THIN SOLID FILMS, V72, P468

[8] LIFE STABILITY OF TRANSPARENT SEMICONDUCTING OXIDE-FILMS DEPOSITED ONTO COLD SUBSTRATES [J].

RUCKER, N ;

BECKER, KJ .

THIN SOLID FILMS, 1978, 53 (02) :163-167

[9] TRANSPARENT CONDUCTIVE FILMS OF IN2O3-SN PREPARED BY THE PYROLYSIS METHOD [J].

RYABOVA, LA ;

SALUN, VS ;

SERBINOV, IA .

THIN SOLID FILMS, 1982, 92 (04) :327-332

[10]

YUANRI C, 1984, THIN SOLID FILMS, V115, P195

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