CORRECTION FOR CHROMATIC ABERRATION IN MICROSCOPE PROJECTION PHOTOLITHOGRAPHY

[1] FEUER MD, 1978, AIP C P, V44, P317

[2] FEUER MD, 1980, THESIS YALE U

[3] FRANK DJ, 1982, THESIS HARVARD U

[4] FREUR MD, 1981, IEEE T ELECTRON DEVI, V28, P1375

[5] PROJECTION MASKING, THIN PHOTORESIST LAYERS AND INTERFERENCE EFFECTS [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1970, 14 (02) : 117 - +

[6] NUSSBAUM A, 1976, CONT OPTICS SCI ENG, pCH4

[7] MICROSCOPIC CIRCUIT FABRICATION ON REFRACTORY SUPERCONDUCTING FILMS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (11) : 1621 - 1624

[8] PROBER DE, 1981, IEEE T ELECTRON DEVI, V28, P1347

[9] SMITH DP, 1981, THESIS DARTMOUTH COL

[1] FEUER MD, 1978, AIP C P, V44, P317

[2] FEUER MD, 1980, THESIS YALE U

[3] FRANK DJ, 1982, THESIS HARVARD U

[4] FREUR MD, 1981, IEEE T ELECTRON DEVI, V28, P1375

[5] PROJECTION MASKING, THIN PHOTORESIST LAYERS AND INTERFERENCE EFFECTS [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1970, 14 (02) : 117 - +

[6] NUSSBAUM A, 1976, CONT OPTICS SCI ENG, pCH4

[7] MICROSCOPIC CIRCUIT FABRICATION ON REFRACTORY SUPERCONDUCTING FILMS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (11) : 1621 - 1624

[8] PROBER DE, 1981, IEEE T ELECTRON DEVI, V28, P1347

[9] SMITH DP, 1981, THESIS DARTMOUTH COL