LASER CHEMICAL VAPOR-DEPOSITION OF SELECTED AREA FE AND W FILMS

被引：69

作者：

ALLEN, SD

TRINGUBO, AB

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 03期

关键词：

D O I：

10.1063/1.332154

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1641 / 1643

页数：3

共 12 条

[1] PROPERTIES OF SEVERAL TYPES OF FILMS DEPOSITED BY LASER CVD [J].

ALLEN, SD ;

TRIGUBO, AB ;

TEISINGER, ML .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :469-470

[2] LASER CHEMICAL VAPOR-DEPOSITION - A TECHNIQUE FOR SELECTIVE AREA DEPOSITION [J].

ALLEN, SD .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) :6501-6505

[3]

[Anonymous], 1966, J ELECTROCHEM SOC

[4] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF POLYCRYSTALLINE SI FROM SICL4 [J].

BARANAUSKAS, V ;

MAMMANA, CIZ ;

KLINGER, RE ;

GREENE, JE .

APPLIED PHYSICS LETTERS, 1980, 36 (11) :930-932

[5] THE MOLECULAR STRUCTURE OF MOF6 WF6, AND UF6 FROM INFRARED AND RAMAN SPECTRA [J].

BURKE, TG ;

SMITH, DF ;

NIELSEN, AH .

JOURNAL OF CHEMICAL PHYSICS, 1952, 20 (03) :447-454

[6] THE INFRARED SPECTRUM AND VIBRATIONAL ASSIGNMENT FOR FE(CO)5 BONDING CONSIDERATIONS [J].

EDGELL, WF ;

WILSON, WE ;

SUMMITT, R .

SPECTROCHIMICA ACTA, 1963, 19 (06) :863-872

[7] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS [J].

EHRLICH, DJ ;

OSGOOD, RM ;

DEUTSCH, TF .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1980, 16 (11) :1233-1243

[8]

GRAY DE, 1972, AM I PHYSICS HDB

[9] VIBRATIONAL SPECTRA AND FORCE CONSTANTS OF THE HEXACARBONYLS OF CHROMIUM, MOLYBDENUM AND TUNGSTEN [J].

JONES, LH .

SPECTROCHIMICA ACTA, 1963, 19 (01) :329-338

[10] INVESTIGATION OF LASER-ENHANCED ELECTROPLATING MECHANISMS [J].

PUIPPE, JC ;

ACOSTA, RE ;

VONGUTFELD, RJ .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (12) :2539-2545

← 1 2 →