SINGLE TARGET SPUTTERING OF SUPERCONDUCTING YBA2CU3O7-DELTA THIN-FILMS ON SI(100)

被引：35

作者：

MIGLIUOLO, M

STAMPER, AK

GREVE, DW

SCHLESINGER, TE

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 09期

关键词：

D O I：

10.1063/1.101557

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：859 / 861

页数：3

共 20 条

[1]

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[4] Y-BA-CU-O THIN-FILM ON SI SUBSTRATE [J].

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[5]

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[7]

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[8] HIGH-TC YBA2CU3O7-X THIN-FILMS ON SI SUBSTRATES BY DC MAGNETRON SPUTTERING FROM A STOICHIOMETRIC OXIDE TARGET [J].

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APPLIED PHYSICS LETTERS, 1988, 52 (26) :2263-2265

[9] EPITAXIAL-GROWTH OF YTTRIA-STABILIZED ZIRCONIA FILMS ON SILICON BY ULTRAHIGH-VACUUM ION-BEAM SPUTTER DEPOSITION [J].

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APPLIED PHYSICS LETTERS, 1988, 53 (16) :1506-1508

[10]

MIGLIUOLO M, UNPUB

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