INVESTIGATIONS ON THE LATERAL DISTRIBUTION OF THE EMISSION-LINE INTENSITIES IN THE PLASMA OF A GRIMM-TYPE GLOW-DISCHARGE SOURCE

被引:30
作者
HOFFMANN, V
EHRLICH, G
机构
[1] Institut für Festkörperanalytik, Strukturforschung im Institut für Festkörper- und Werkstofforschung Dresden e.V., Dresden, D-01171
[2] D-01307 Dresden
关键词
D O I
10.1016/0584-8547(94)00147-N
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
The distribution of emitting species in the plasma of a GRIMM-type glow discharge source for optical emission spectroscopy (GD-OES) has been investigated by line intensity measurements in parts of the plasma separately imaged onto the entrance slit of the spectral apparatus. Whereas the species of chemically homogeneous sample surfaces are distributed in the plasma parabolicly with the maximum at the centre of the sputtering crater, the species of a coarse inclusion-adjusted at different distances from the crater centre and thus simulating sample inhomogeneity-form a cone the apex, of which corresponds to the position of the inclusion on the sample surface in each case. Contrary to this behaviour of sputtered species, the species of the sputtering gas and its impurities show a constant distribution over nearly the whole excitation area, thus indicating a position-independent constant excitation. These results should be used for improving the reliability and detection limits of GD-OES bulk analysis by better adaptation of slit illumination to the actual analytical task. Moreover, the information obtained on the excitation and the distribution of the emitting species is important for modelling calculations in connection with the quantification of GD-OES depth profiling. Finally, the distribution of the species in the plasma must be considered for plasma diagnostic measurements of spectral line intensities.
引用
收藏
页码:607 / 616
页数:10
相关论文
共 6 条
[1]  
DOGAN HM, 1970, THESIS U BOCHUM, P81
[2]   GLOW-DISCHARGE OPTICAL-EMISSION SPECTROSCOPY AS APPLIED TO THE ANALYSIS OF POWDERED MATERIALS [J].
EHRLICH, G ;
STAHLBERG, U ;
HOFFMANN, V ;
SCHOLZE, H .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1991, 46 (02) :115-124
[3]  
HONERJAGERSOHM M, 1944, SPECTROCHIM ACTA, V2, P396
[4]  
KAISER H, 1947, SPECTROCHIM ACTA, V3, P529
[5]   CONTRIBUTIONS TO COMPUTER-AIDED INTERPRETATION OF ION SPUTTERING DEPTH PROFILING [J].
OSWALD, S ;
HOFFMANN, V ;
EHRLICH, G .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1994, 49 (11) :1123-1145
[6]   INFLUENCE OF AXIAL AND RADIAL DIFFUSION-PROCESSES ON THE ANALYTICAL PERFORMANCE OF A GLOW-DISCHARGE CELL [J].
VANSTRAATEN, M ;
GIJBELS, R ;
VERTES, A .
ANALYTICAL CHEMISTRY, 1992, 64 (17) :1855-1863