IONIZATION PROBABILITY OF SPUTTERED ATOMS

被引：222

作者：

LANG, ND

机构：

来源：

PHYSICAL REVIEW B | 1983年 / 27卷 / 04期

关键词：

D O I：

10.1103/PhysRevB.27.2019

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：2019 / 2029

页数：11

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