CO AND CO2 THIN-FILM SNO2 GAS SENSORS ON SI SUBSTRATES

被引：48

作者：

HOEFER, U

KUHNER, G

SCHWEIZER, W

SULZ, G

STEINER, K

机构：

[1] Fraunhofer-Institut für Physikalische Messtechnik, D-79110 Freiburg

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1994年 / 22卷 / 02期

关键词：

CARBON DIOXIDE; CARBON MONOXIDE; GAS SENSORS; SILICON; TIN OXIDE;

D O I：

10.1016/0925-4005(94)87009-8

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Thin-fim SnO2 gas sensors have been structured on Si substrates. The sensors are temperature stable at 900-degrees-C in synthetic air for 48 h. No significant outdiffusion of the sensor layers can be observed after annealing. Pt catalysts lead to CO sensors without cross sensitivity to CO2. Pt/Ca catalyst combinations also lead to CO2 gas response. CO2 sensitivity between 1000 and 10 000 ppm has been demonstrated at 270-degrees-C. CO2 might be indirectly detected via humidity exchange between CO2 and the heated Ca-catalysed SnO2 surface.

引用

页码：115 / 119

页数：5

共 12 条

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