A UHV-COMPATIBLE DELTA-E-E GAS TELESCOPE FOR DEPTH PROFILING AND SURFACE-ANALYSIS OF LIGHT-ELEMENTS

被引：28

作者：

BEHROOZ, AM

HEADRICK, RL

SEIBERLING, LE

ZURMUHLE, RW

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 28卷 / 01期

关键词：

D O I：

10.1016/0168-583X(87)90044-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：108 / 112

页数：5

共 7 条

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[5] A METHOD FOR ANALYSIS AND PROFILING OF BORON, CARBON AND OXYGEN IMPURITIES IN SEMICONDUCTOR WAFERS BY RECOIL ATOMS IN HEAVY-ION BEAMS [J].

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[6]

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[7] A DELTA-E-E TELESCOPE WITH VERY LARGE SOLID ANGLE [J].

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