SURFACE DISRUPTION AS AN OBSERVABLE FACTOR IN THE ENERGY-DISTRIBUTION OF SPUTTERED PARTICLES

被引：23

作者：

ROOSENDAAL, HE ^{[1
]}

HARING, RA ^{[1
]}

SANDERS, JB ^{[1
]}

机构：

[1] FOM,INST ATOOM & MOLECUULFYS,1098 SJ AMSTERDAM,NETHERLANDS

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1982年 / 194卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(82)90584-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：579 / 581

页数：3

共 11 条

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JOHAR, SS ;

THOMPSON, DA .

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[2] THERMAL EFFECTS IN SPUTTERING [J].

KELLY, R .

SURFACE SCIENCE, 1979, 90 (02) :280-318

[3]

PEDRYS R, UNPUB

[4] ON THE ENERGY-DISTRIBUTION AND ANGULAR-DISTRIBUTION OF SPUTTERED PARTICLES [J].

ROOSENDAAL, HE ;

SANDERS, JB .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 52 (3-4) :137-143

[5]

ROOSENDAAL HE, 1980, P S SPUTTERING, P302

[6] TIME-DEPENDENCE OF RADIATION-DAMAGE CASCADES [J].

SANDERS, JB ;

WINTERBON, KB .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1974, 22 (02) :109-115

[7] TIME EVOLUTION OF COLLISION-INDUCED HOT SPIKES [J].

SANDERS, JB .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 51 (1-2) :43-48

[8]

SZYMONSKI M, P SOS VIENNA, P312

[9]

THOMPSON DA, 1979, APPL PHYS LETT, V34, P343

[10]

THOMPSON DA, 1980, P S SPUTTERING, P62

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