IMPURITY DEPOSITION ON ALT-I LIMITER HEADS

被引:26
作者
MCGRATH, RT
DOYLE, BL
BROOKS, JN
PONTAU, AE
THOMAS, GJ
机构
[1] SANDIA NATL LABS, LIVERMORE, CA 94550 USA
[2] ARGONNE NATL LAB, ARGONNE, IL 60439 USA
关键词
D O I
10.1016/0022-3115(87)90419-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:660 / 664
页数:5
相关论文
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