DETECTION OF MERCURY-VAPOR USING RESONATING MICROCANTILEVERS

被引：365

作者：

THUNDAT, T

WACHTER, EA

SHARP, SL

WARMACK, RJ

机构：

[1] Health Sciences Research Division, Oak Ridge National Laboratory, Oak Ridge

来源：

APPLIED PHYSICS LETTERS | 1995年 / 66卷 / 13期

关键词：

D O I：

10.1063/1.113896

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Oscillating silicon nitride microcantilevers coated with a thin gold film have been used to detect mercury vapor in air. Cantilever resonance frequency changes due to surface mass loading as a result of adsorption of mercury vapor. Furthermore, cantilever bending is also altered due to changes in surface stress induced by mercury adsorption on the gold overlayer. Both of these phenomena can be used to quantitatively detect adsorbed vapors with picogram mass resolution.© 1995 American Institute of Physics.

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页码：1695 / 1697

页数：3

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