SOLID-PHASE-EPITAXIAL GROWTH IN ION-IMPLANTED SILICON

被引：48

作者：

NARAYAN, J

HOLLAND, OW

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1982年 / 73卷 / 01期

关键词：

D O I：

10.1002/pssa.2210730129

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：225 / 236

页数：12

共 30 条

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