DEPOSITION PROCESSES FOR FILMS AND COATINGS

被引：13

作者：

BISWAS, DR

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1986年 / 21卷 / 07期

关键词：

D O I：

10.1007/BF01114260

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：2217 / 2223

页数：7

共 65 条

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[6]

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[9]

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[10]

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