POLYSILICON MICROGRIPPER

被引：60

作者：

KIM, CJ

PISANO, AP

MULLER, RS

LIM, MG

机构：

[1] UNIV CALIF BERKELEY,BERKELEY SENSOR & ACTUATOR CTR,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720

[2] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1992年 / 33卷 / 03期

关键词：

Electrostatic devices - Fabrication - Microelectromechanical devices - Micromachining - Silicon;

D O I：

10.1016/0924-4247(92)80169-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A polysilicon electrostatic comb-drive microgripper has been designed and fabricated using surface micromachining on a silicon wafer. It features flexible cantilever comb-drive arms with a bidirectional actuation scheme and over-range protectors. Three different electromechanical models are developed and, along with fabrication constraints, are employed to design the microgripper and to simulate its performance. Experiments demonstrate that a gripping range of 10-mu-m can be effected with an applied potential variation of less than 20 V. The motion dependence on drive voltage is measured and compared with predictions from models; it is observed to be smooth, stable. and controllable. Experimental behavior (voltage versus displacement) is characterized for voltages up to 50 V.

引用

页码：221 / 227

页数：7