ION-IMPLANTATION EFFECTS IN AL2O3 - HYDRATION AND OPTICAL-ABSORPTION

Implants (Ar, Xe) into alpha-Al2O3 result in H uptake from the ambient atmosphere. The H inventories tended toward maximization at levels between 10(21) and 10(22) keV/cm3 with decreased uptake at the higher levels (10(23)-10(24) keV/cm3). Al implants showed little H incursion below 10(21) keV/cm3 followed by a near-linear increase with no saturation observed for the highest deposition values (approximately 10(23) keV/cm3). Al implants also produce anomalously large F-center concentrations due to locally high Al concentrations and track the increases established for H uptake. The optical measurements are compared with those for H implants which also yield anomalously large F-center concentrations.