EXPITAXIAL GROWTH OF AG DEPOSITED BY ION DEPOSITION ON NACI

被引:20
作者
NAMBA, Y [1 ]
MORI, T [1 ]
机构
[1] TOKYO NOKO UNIV, FAC TECHNOL, DEPT ELECT ENGN, TOKYO, JAPAN
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 03期
关键词
D O I
10.1116/1.568971
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:693 / 697
页数:5
相关论文
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