ATOMIC UNDERLAYER FORMATION DURING REACTION OF TI[0001] WITH NITROGEN

被引:80
作者
SHIH, HD
JONA, F
JEPSEN, DW
MARCUS, PM
机构
[1] SUNY STONY BROOK,DEPT MAT SCI,STONY BROOK,NY 11790
[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1016/0039-6028(76)90328-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:445 / 465
页数:21
相关论文
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