TEMPORALLY RESOLVED LASER DIAGNOSTIC MEASUREMENTS OF ATOMIC-HYDROGEN CONCENTRATIONS IN RF PLASMA DISCHARGES

被引：21

作者：

PREPPERNAU, BL

DOLSON, DA

GOTTSCHO, RA

MILLER, TA

机构：

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1989年 / 9卷 / 02期

关键词：

D O I：

10.1007/BF01054278

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：157 / 164

页数：8

共 12 条

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[9]

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