EFFECTS ON H- PRODUCTION IN A MULTICUSP ION-SOURCE BY MIXTURES OF H-2 WITH H2O, NH3, CH4, N2H4, AND SF6

被引：4

作者：

ORIENT, OJ ^{[1
]}

CHUTJIAN, A ^{[1
]}

LEUNG, KN ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,BERKELEY,CA 94720

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 02期

关键词：

D O I：

10.1063/1.339810

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：397 / 401

页数：5

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