ATOMIC NITROGEN-PRODUCTION IN NITROGEN-PLASMA SOURCES USED FOR THE GROWTH OF ZNSE-N AND RELATED ALLOYS BY MOLECULAR-BEAM EPITAXY

被引：39

作者：

VAUDO, RP ^{[1
]}

COOK, JW ^{[1
]}

SCHETZINA, JF ^{[1
]}

机构：

[1] N CAROLINA STATE UNIV,DEPT PHYS,RALEIGH,NC 27695

来源：

JOURNAL OF CRYSTAL GROWTH | 1994年 / 138卷 / 1-4期

关键词：

D O I：

10.1016/0022-0248(94)90846-X

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

A high resolution study of the optical emission from nitrogen-plasmas produced by an Oxford Applied Research radio frequency plasma source is reported. Strong atomic emission lines in the near-infrared spectral region provide unequivocal evidence that the nitrogen-plasma source generates an appreciable flux of nitrogen atoms. Nitrogen atoms, rather than N2 Molecules in the plasma, are the most likely nitrogen-plasma species responsible for the successful p-type doping of ZnSe:N and related alloys. Emission spectra from the radio frequency nitrogen-plasma source are compared with similar emission spectra obtained from an electron cyclotron resonance microwave nitrogen-plasma source.

引用

页码：430 / 436

页数：7

共 23 条

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BARRINGTON AE, 1963, HIGH VACUUM ENG, P13

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