SPATIALLY RESOLVED DEFECT MAPPING IN SEMICONDUCTORS USING LASER-MODULATED THERMOREFLECTANCE

被引：45

作者：

GUIDOTTI, D

VANDRIEL, HM

机构：

[1] UNIV TORONTO,DEPT PHYS,TORONTO M5S 1A7,ONTARIO,CANADA

[2] UNIV TORONTO,ERINDALE COLL,TORONTO M5S 1A7,ONTARIO,CANADA

来源：

关键词：

D O I：

10.1063/1.96272

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1336 / 1338

页数：3

共 28 条

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[5] THERMOOPTICAL SPECTROSCOPY - DETECTION BY THE MIRAGE EFFECT
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[J]. SOLID STATE COMMUNICATIONS, 1970, 8 (08) : 587 - +
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[10] GUIDOTTI D, 1985, UNPUB JUN REV PROGR