DIRECT X-RAY SENSITIVE CHARGE-COUPLED DEVICE (CCD) AS A DETECTOR IN THE STUDY OF SYNCHROTRON SECTION TOPOGRAPHS

被引：2

作者：

TUOMI, T ^{[1
]}

PARTANEN, J ^{[1
]}

SIMOMAA, K ^{[1
]}

机构：

[1] CCD PHOTON LTD,SF-02720 ESPOO,FINLAND

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 61卷 / 04期

关键词：

D O I：

10.1016/0168-583X(91)95340-J

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Synchrotron section topographs showing a set of parallel Pendellosung fringes typical of a perfect silicon wafer are measured with a direct X-ray sensitive linear charge-coupled device (CCD) at room temperature. The results are compared with those calculated from the dynamical theory of X-ray diffraction and with those measured from a highest resolution X-ray film with a densitometer. No radiation damage is observed in the experiment.

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页码：569 / 574

页数：6

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