PHOTOLUMINESCENCE OF NANOCRYSTALLITES EMBEDDED IN HYDROGENATED AMORPHOUS-SILICON FILMS

被引:23
作者
LIU, XN [1 ]
TONG, S [1 ]
WANG, LC [1 ]
CHEN, GX [1 ]
BAO, XM [1 ]
机构
[1] NANJING UNIV,CTR ANAL,NANJING 210093,PEOPLES R CHINA
关键词
D O I
10.1063/1.360778
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have fabricated light-emitting nanocrystallites embedded in an a-Si:H matrix using a conventional plasma-enhanced chemical-vapor-deposition system. It was found that the photoluminescence properties are directly related to the deposition parameters. The quantum size effect model is proposed to explain the photoluminescence. Two structural prerequisites are proposed for this kind of films to exhibit effective light emission: One is an upper limit for mean crystallite size of about 3.4 nm, the other is an upper limit for crystallinity of about 30%. (C) 1995 American Institute of Physics.
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页码:6193 / 6196
页数:4
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