GRAPHITE THIN-FILM FORMATION BY CHEMICAL-VAPOR-DEPOSITION

被引:42
作者
YUDASAKA, M [1 ]
KIKUCHI, R [1 ]
MATSUI, T [1 ]
KAMO, H [1 ]
OHKI, Y [1 ]
YOSHIMURA, S [1 ]
OTA, E [1 ]
机构
[1] GUNMA UNIV,FAC ENGN,DEPT CHEM,KIRYU,GUNMA 376,JAPAN
关键词
D O I
10.1063/1.110998
中图分类号
O59 [应用物理学];
学科分类号
摘要
Well-ordered graphite thin films were obtained by chemical vapor deposition of 2-methyl-1, 2'-naphthyl ketone on Ni substrates at substrate temperatures higher than 600 degrees C. Values of interlayer spacing calculated from x-ray diffraction data were between 3.360 and 3.350 Angstrom. Raman scattering spectra of the films showed a peak centering at 1580 cm(-1).
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页码:842 / 844
页数:3
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