ACTION OF FAR ULTRAVIOLET-RADIATION (185-NM) ON POLY(ETHYLENE-TEREPHTHALATE) FILMS - A METHOD FOR CONTROLLED DRY-ETCHING

被引：31

作者：

SRINIVASAN, R

机构：

来源：

POLYMER | 1982年 / 23卷 / 13期

关键词：

D O I：

10.1016/0032-3861(82)90206-3

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

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页码：1863 / 1864

页数：2

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