RADIALLY DEPENDENT SOLUTIONS OF BOLTZMANN-EQUATION IN LOW-TEMPERATURE PLASMAS USING A MODIFIED 2-TERM EXPANSION

被引:39
作者
HARTIG, MJ [1 ]
KUSHNER, MJ [1 ]
机构
[1] UNIV ILLINOIS,DEPT ELECT & COMP ENGN,1406 W GREEN ST,URBANA,IL 61801
关键词
D O I
10.1063/1.353295
中图分类号
O59 [应用物理学];
学科分类号
摘要
A new method for obtaining spatially resolved electron energy distributions is described and applied to cylindrical bore electric discharges. The method is based on a modified two-term spherical harmonic expansion of Boltzmann's equation in which energy-resolved drift and diffusion are included, as well as Joule heating or cooling by the ambipolar field. It is found that low-energy electrons may be heated by the large ambipolar electric field gradients near the wall while higher-energy electrons may escape the plasma. Therefore, diffusion cooling and Joule heating in the ambipolar field may simultaneously occur, but for different portions of the electron energy distribution.
引用
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页码:1080 / 1090
页数:11
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