2-WAVELENGTH DOUBLE HETERODYNE INTERFEROMETRY USING A MATCHED GRATING TECHNIQUE

被引：36

作者：

SODNIK, Z

FISCHER, E

ITTNER, T

TIZIANI, HJ

机构：

[1] Stuttgart University, Institute for Technical Optics, Stuttgart 80

来源：

APPLIED OPTICS | 1991年 / 30卷 / 22期

关键词：

D O I：

10.1364/AO.30.003139

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Two-wavelength double heterodyne interferometry is applied for topographic measurements on optically rough target surfaces. A two-wavelength He-Ne laser and a matched grating technique are used to improve system stability and to simplify heterodyne frequency generation.

引用

页码：3139 / 3144

页数：6

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