REGULARIZATION IN ELLIPSOMETRY - NEAR-SURFACE DEPTH PROFILES OF THE REFRACTIVE-INDEX

被引：17

作者：

KAISER, JH

机构：

来源：

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY | 1988年 / 45卷 / 01期

关键词：

D O I：

10.1007/BF00692332

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1 / 5

页数：5

共 16 条

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[5] RESTORATION OF OPTICAL OBJECTS USING REGULARIZATION
BERTERO, M
DEMOL, C
VIANO, GA
[J]. OPTICS LETTERS, 1978, 3 (02) : 51 - 53
[6] ELLIPSOMETRIC FORMULAS FOR AN INHOMOGENEOUS LAYER WITH ARBITRARY REFRACTIVE-INDEX PROFILE
CHARMET, JC
DEGENNES, PG
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1983, 73 (12) : 1777 - 1784
[7] FRISCH U, 1966, ANN ASTROPHYS, V29, P645
[8] HOFMANN B, 1986, REGULARIZATION APPLI
[9] Jacobsson R., 1966, PROGR OPTICS, V5
[10] KLEIN MV, 1970, OPTICS, pCH11