TEMPERATURE AND VELOCITY PROFILES AND ENERGY BALANCES FOR AN INDUCTIVELY COUPLED PLASMA DISCHARGE IN NITROGEN

被引：45

作者：

BARNES, RM ^{[1
]}

NIKDEL, S ^{[1
]}

机构：

[1] UNIV MASSACHUSETTS,DEPT CHEM,AMHERST,MA 01002

来源：

JOURNAL OF APPLIED PHYSICS | 1976年 / 47卷 / 09期

关键词：

D O I：

10.1063/1.323266

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：3929 / 3934

页数：6

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