ABSORPTION OF CARBON FROM RESIDUAL GASES DURING TI IMPLANTATION OF ALLOYS

被引：69

作者：

SINGER, IL ^{[1
]}

BARLAK, TM ^{[1
]}

机构：

[1] GEO CTR INC,SUITLAND,MD 20746

来源：

关键词：

D O I：

10.1063/1.94387

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：457 / 459

页数：3

共 8 条

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[4] USE OF ION-BEAM ANALYSIS IN METAL MODIFICATION BY MEANS OF ION-IMPLANTATION
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[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3): : 101 - 113
[5] KNAPP JA, 1980, APPL PHYS LETT, V37, P330
[6] PREECE CM, 1980, ION IMPLANTATION MET, P152
[7] CARBURIZATION OF STEEL SURFACES DURING IMPLANTATION OF TI IONS AT HIGH FLUENCES
SINGER, IL
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02): : 419 - 422
[8] FRICTION BEHAVIOR OF 52100 STEEL MODIFIED BY ION-IMPLANTED TI
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REED, JR
[J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 923 - 932