MODELING OF THE MECHANICAL-BEHAVIOR OF A DIFFERENTIAL CAPACITOR ACCELERATION SENSOR

被引：44

作者：

KUEHNEL, W

机构：

[1] Regensburg, 93055

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1995年 / 48卷 / 02期

关键词：

ACCELERATION SENSORS; MECHANICAL MODELING;

D O I：

10.1016/0924-4247(94)00983-O

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A mechanical model and its mathematical solution are presented, which have been developed in order to calculate the sensitivity and frequency behaviour of an acceleration sensor. The sensor is built up as an interdigitated differential capacitor and is driven in a 'high frequency' detection circuitry with an overall electromechanical closed-loop configuration. It is fabricated using surface micromachining techniques and consists of 2 mu m thick polysilicon beams. Due to the processes during manufacturing technology, the material contains an inherent tensile stress, such that the mechanical behaviour is not only determined by the restoring bending moments of the suspension tethers. The calculated deflection of the sensor element amounts to only 0.6 nm g(-1); its resonance frequency is about 21 kHz. The results will be discussed and compared with the results obtained by finite-element analysis.

引用

页码：101 / 108

页数：8

共 15 条

[1]

BEITZ W, 1987, DUBBEL TASCHENBUCH F, pC7

[2]

CORE T, 1991, SENSORS EXPO P

[3]

CORE TA, 1993, SOLID STATE TECH OCT, P39

[4]

GOODENOUGH F, 1991, ELECTRONIC DESIG AUG

[5]

HEUBERGER A, 1989, MIKROMECHNAIK, P51

[6]

KRULEVITCH P, 1991, 6 INT C SOL STAT SEN, P949

[7] A SURFACE MICROMACHINED SILICON ACCELEROMETER WITH ON-CHIP DETECTION CIRCUITRY [J].

KUEHNEL, W ;

SHERMAN, S .

SENSORS AND ACTUATORS A-PHYSICAL, 1994, 45 (01) :7-16

[8]

KUEHNEL W, 1992, VDI SERIES, V10, P7

[9]

PAYNE RS, SAE910496 TECH PAP, P127

[10]

SHERMAN SJ, 1992, JUN VLSI S SEATTL

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