SPUTTERING AND MIGRATION DURING TA IMPLANTATION OF FE

被引：4

作者：

GRABOWSKI, KS

CORRELL, FD

VOZZO, FR

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90472-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：798 / 802

页数：5

共 15 条

[1]

Andersen H. H., 1984, Ion implantation and beam processing, P127

[2]

ASHWORTH V, 1977, CORROS SCI, V17, P947, DOI 10.1016/S0010-938X(77)80010-3

[3] LOW-TEMPERATURE ION-BEAM MIXING OF PLATINUM MARKERS IN IRON [J].

BOTTIGER, J ;

NIELSEN, SK ;

WHITLOW, HJ ;

WRIEDT, P .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :684-686

[4] ON THE COLLECTIVE CURRENT CONCEPT IN THE THEORY OF ATOMIC MIXING [J].

COLLINS, R .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :809-813

[5]

DAVISSON CM, 5409 NAV RES LAB MEM

[6] SURFACE-TOPOLOGY USING RUTHERFORD BACKSCATTERING [J].

EDGE, RD ;

BILL, U .

NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3) :157-162

[7]

FARKAS D, UNPUB J APPL PHYS

[8] SIMULTANEOUS HIGH DEPTH RESOLUTION PROFILING OF CARBON AND OXYGEN [J].

GOSSETT, CR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :149-153

[9]

GRABOWSKI KS, 1984, MATER RES SOC S P, V27, P615

[10] WEAR TESTING UNDER HIGH LOAD CONDITIONS - THE EFFECT OF ANTI-SCUFF ADDITIONS TO AISI 3135, 52100 AND 9310 STEELS INTRODUCED BY ION-IMPLANTATION AND ION-BEAM MIXING [J].

HARTLEY, NEW ;

HIRVONEN, JK .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :933-940

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