STABILITY AND SENSITIVITY OF AN EWMA CONTROLLER

被引:175
作者
INGOLFSSON, A [1 ]
SACHS, E [1 ]
机构
[1] MIT,DEPT MECH ENGN,CAMBRIDGE,MA 02139
关键词
EWMA; SPC; STABILITY CRITERIA; FEEDBACK CONTROL;
D O I
10.1080/00224065.1993.11979473
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The performance of a process control algorithm based on the EWMA statistic is analyzed. A simple condition relating the EWMA weight and the estimated process gain is shown to ensure that the control strategy is stable for a first-order multiple-input, single-output process that may be drifting or wandering. A similar condition is shown to guarantee stability far a second-order, single-input process. An expression is derived for the output mean squared deviation from target as a function of the algorithm parameters, how quickly the process drifts or wanders, and the amount of noise. The results are illustrated in the context of an epitaxial growth process.
引用
收藏
页码:271 / 287
页数:17
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