THICK-FILM ACOUSTIC-WAVE SENSOR STRUCTURE

被引：12

作者：

WHITE, NM

KO, VTK

机构：

[1] Department of Electronics & Computer Science, University of Southampton

来源：

ELECTRONICS LETTERS | 1993年 / 29卷 / 20期

关键词：

ACOUSTIC TRANSDUCERS; THICK FILM DEVICES; PIEZOELECTRIC DEVICES;

D O I：

10.1049/el:19931202

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The scope for thick-film sensor development has largely been limited by the lack of special-purpose sensing pastes. Using a new piezoelectric thick-film we have developed a novel acoustic wave sensor which allows an expansion of the technology into areas previously overlooked.

引用

页码：1807 / 1808

页数：2

共 4 条

[1]

Baudry H., 1987, Sixth European Microelectronics Conference Proceedings. ISHM Europe '87, P456

[2] SENSOR APPLICATIONS OF THICK-FILM TECHNOLOGY [J].

BRIGNELL, JE ;

WHITE, NM ;

CRANNY, AWJ .

IEE PROCEEDINGS-I COMMUNICATIONS SPEECH AND VISION, 1988, 135 (04) :77-84

[3]

MORTEN B, 1991, 8TH EUROPEAN HYBRID MICROELECTRONICS CONFERENCE, PROCEEDINGS, P392

[4] ACOUSTIC SURFACE WAVE FILTERS [J].

TANCRELL, RH ;

HOLLAND, MG .

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1971, 59 (03) :393-+

← 1 →