PREPARATION OF CO FERRITE FILMS BY PLASMA-ENHANCED METALORGANIC CHEMICAL-VAPOR-DEPOSITION

Thin films of Co ferrite and Co-Zn ferrite (Co1-xZnxFe2O4, 0 less than or equal to 0.5) with partial preferential orientation of the (100) plane parallel to the film surface were prepared on soda-lime glass substrates at 400 degrees C by plasma-enhanced metalorganic chemical vapor deposition. Faraday rotation of the CoFe2O4 film took the negative maximum value of -2.8 x 10(4) deg/cm near 700 nm in the wavelength range from 550 nm to 1100 nm. The Faraday hysteresis loop indicated that the CoFe2O4 film had perpendicular magnetic anisotropy, which was caused mainly by the intrinsic stress-induced uniaxial anisotropy. Faraday rotation at 800 nm and Curie temperature decreased with increasing Zn content x.