USE OF COMPLEX IMPEDANCE SPECTROSCOPY IN CHEMICAL SENSOR CHARACTERIZATION

被引：35

作者：

GUTIERREZ, J ^{[1
]}

ARES, L ^{[1
]}

HORILLO, MC ^{[1
]}

SAYAGO, I ^{[1
]}

AGAPITO, J ^{[1
]}

LOPEZ, L ^{[1
]}

机构：

[1] UNIV COMPLUTENSE MADRID,FAC C FIS,DEPT ELECTR,E-28040 MADRID,SPAIN

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1991年 / 4卷 / 3-4期

关键词：

D O I：

10.1016/0925-4005(91)80136-8

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The complex impedance method is a powerful tool in the characterization of gas adsorption in semiconductor structures used as gas sensors. Different tin oxide structures have been used. In tests of sensitivity to dry air, air + H2O, O2, etc, the operating temperature has increased to 175-degrees-C. A variable frequency (10-mu-Hz - 32 MHz) a.c. voltage is applied to the sensor structure to perform the complex impedance spectrum measurements. The different parameters are a function of the type of gas in the atmosphere. A model has been proposed based on adsorption on the grain boundary.

引用

页码：359 / 363

页数：5

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