GENERATION OF NEGATIVE ION-RICH PLASMA IN ELECTRO-NEGATIVE GASES (OXYGEN)

被引：14

作者：

BACAL, M ^{[1
]}

DOUCET, HJ ^{[1
]}

机构：

[1] ECOLE POLYTECH PARIS, CNRS, LAB PMI, 17 RUE DESCARTES, 75005 PARIS, FRANCE

来源：

VACUUM | 1974年 / 24卷 / 11-1期

关键词：

D O I：

10.1016/0042-207X(74)90039-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：595 / 600

页数：6

共 20 条

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