PREPARATION OF DIELECTRIC THIN-FILMS FROM PHOTOSENSITIVE SOL-GEL SOLUTION

被引：13

作者：

SOYAMA, N

SASAKI, G

ATSUKI, T

YONEZAWA, T

OGI, K

机构：

[1] Metallurgy and New Material Division, Central Research Institute, Mitsubishi Materials Corporation, Omiya, Saitama, 330

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1994年 / 33卷 / 9B期

关键词：

SOL-GEL; PHOTOSENSITIVITY; BST; THIN FILM; PATTERNING; UV IRRADIATION;

D O I：

10.1143/JJAP.33.5268

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Fine-patterned BaxSr1-xTiO3 (BST) thin films were successfully fabricated from a photosensitive sol-gel solution by means of UV irradiation. This solution was prepared from barium acetate, strontium acetate, and titanium isopropoxide. BST gel films on substrates formed from the solution by spin-coating were irradiated with UV rays through a mask pattern and developed with a mixture of ethanol and water. The obtained patterns were a negative of the mask. The films were finally annealed for crystallization. The obtained films had perovskite structure and good properties.

引用

页码：5268 / 5271

页数：4

共 5 条

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