FORMATION OF AMORPHOUS METAL METALLOID COMPOUNDS THROUGH ION-IMPLANTATION

被引:59
作者
RAUSCHENBACH, B
HOHMUTH, K
机构
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1982年 / 72卷 / 02期
关键词
D O I
10.1002/pssa.2210720229
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:667 / 678
页数:12
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