INVESTIGATION AND INTERPRETATION OF ADSORPTION ON SILICON SURFACES

被引:13
作者
KLEINT, C
机构
[1] Karl-Marx-Univ Leipzig, Leipzig, East Ger, Karl-Marx-Univ Leipzig, Leipzig, East Ger
关键词
D O I
10.1016/0042-207X(86)90604-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
38
引用
收藏
页码:267 / 273
页数:7
相关论文
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