SOFT-X-RAY PROJECTION LITHOGRAPHY USING AN X-RAY REDUCTION CAMERA

[1] Barbee Jr. T.W., 1981, AIP C P, V75, P131

[2] Bekefi G., 1966, RAD PROCESSES PLASMA

[3] CHAKER M, 1987, SPIE C P, V831, P237

[4] Goodman J. W, 2005, INTRO FOURIER OPTICS

[5] APPLICATIONS OF MICROFABRICATION TECHNOLOGY TO X-RAY LASER CAVITIES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 2153 - 2157

[6] HAWRYLUK AM, 1986, SPIE P, V688, P81

[7] HOFFMAN AL, 1985, P SOC PHOTO-OPT INST, V537, P198, DOI 10.1117/12.947502

[8] ROSENBLUTH A, 1983, THESIS U ROCHESTER

[9] INVERSE CASSEGRAINIAN SYSTEMS [J]. APPLIED OPTICS, 1968, 7 (08): : 1483 - &

[10] Spiller E., 1981, AIP C P, V75, P124

[1] Barbee Jr. T.W., 1981, AIP C P, V75, P131

[2] Bekefi G., 1966, RAD PROCESSES PLASMA

[3] CHAKER M, 1987, SPIE C P, V831, P237

[4] Goodman J. W, 2005, INTRO FOURIER OPTICS

[5] APPLICATIONS OF MICROFABRICATION TECHNOLOGY TO X-RAY LASER CAVITIES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 2153 - 2157

[6] HAWRYLUK AM, 1986, SPIE P, V688, P81

[7] HOFFMAN AL, 1985, P SOC PHOTO-OPT INST, V537, P198, DOI 10.1117/12.947502

[8] ROSENBLUTH A, 1983, THESIS U ROCHESTER

[9] INVERSE CASSEGRAINIAN SYSTEMS [J]. APPLIED OPTICS, 1968, 7 (08): : 1483 - &

[10] Spiller E., 1981, AIP C P, V75, P124