INFLUENCE OF HEAVY-PARTICLE COLLISION ON OPTICAL-EMISSION IN CATHODE FALL OF DC ARGON SILANE GLOW-DISCHARGE

被引：2

作者：

MATSUDA, Y ^{[1
]}

ANO, K ^{[1
]}

KAWASAKI, H ^{[1
]}

FUJIYAMA, H ^{[1
]}

机构：

[1] KYUSHU UNIV, FAC ENGN, DEPT ELECT ENGN, FUKUOKA 812, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 7B期

关键词：

OPTICAL EMISSION; SILANE; CATHODE FALL; HEAVY PARTICLE COLLISION; NEGATIVE GLOW; METASTABLE ARGON; CHARGE TRANSFER;

D O I：

10.1143/JJAP.33.4357

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Spatially resolved optical emission profiles were investigated in de silane-argon discharge plasmas under the high E/N condition, where E is electric field strength and N is gas density. The optical line emission intensities of Ar, H, and SiH in both the cathode fall and negative glow regions were well explained by a simple collisional excitation model, in which heavy particle collisions in the cathode fall and electron collisions in the negative glow are taken into account, respectively. As a result, it was confirmed that radical production by heavy particle collision is indispensable in such chemical vapor deposition (CVD) plasmas for operation under the high E/N condition.

引用

页码：4357 / 4360

页数：4

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