OPTICAL-PROPERTIES OF THIN-FILMS

被引：1337

作者：

ASPNES, DE

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(82)90590-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：249 / 262

页数：14

共 38 条

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[2] Aspnes D. E., 1981, Proceedings of the Society of Photo-Optical Instrumentation Engineers, V276, P227
[3] Aspnes D. E., 1976, OPTICAL PROPERTIES S, P799
[4] BOUNDS ON ALLOWED VALUES OF THE EFFECTIVE DIELECTRIC FUNCTION OF 2-COMPONENT COMPOSITES AT FINITE FREQUENCIES
ASPNES, DE
[J]. PHYSICAL REVIEW B, 1982, 25 (02): : 1358 - 1361
[5] CHEMICAL ETCHING AND CLEANING PROCEDURES FOR SI, GE, AND SOME III-V COMPOUND SEMICONDUCTORS
ASPNES, DE
STUDNA, AA
[J]. APPLIED PHYSICS LETTERS, 1981, 39 (04) : 316 - 318
[6] INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY
ASPNES, DE
THEETEN, JB
[J]. PHYSICAL REVIEW B, 1979, 20 (08): : 3292 - 3302
[7] ASPNES DE, UNPUB
[8] Azzam R. M. A., 1976, ELLIPSOMETRY POLARIZ
[9] OPTICAL-PROPERTIES OF LOW-PRESSURE CHEMICALLY VAPOR-DEPOSITED SILICON OVER THE ENERGY-RANGE 3.0-EV-6.0-EV
BAGLEY, BG
ASPNES, DE
ADAMS, AC
MOGAB, CJ
[J]. APPLIED PHYSICS LETTERS, 1981, 38 (01) : 56 - 58
[10] BAGLEY BG, 1980, B AM PHYS SOC, V25, P12