NON-RUTHERFORD BACKSCATTERING ANALYSIS OF NITROGEN-CONTENT IN TITANIUM SUBSTRATES

被引：11

作者：

FOSTER, LA ^{[1
]}

TESMER, JR ^{[1
]}

JERVIS, TR ^{[1
]}

NASTASI, M ^{[1
]}

机构：

[1] LOS ALAMOS NATL LAB, LOS ALAMOS, NM 87544 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 79卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(93)95386-J

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The cross section for 167-degrees backscattering of He-4 from N-14 in the energy range from 4.5 to 9.0 MeV was measured. The targets were made by evaporating 500 angstrom of zirconium on a carbon substrate and implanting with 1.3 x 10(17) N2/cm2 at 33 keV. A large scattering resonance, approximately 80 times Rutherford and FWHM > 200 keV, was found at 8.81 MeV. Titanium samples were irradiated using pulsed excimer laser radiation at 248 nm in nitrogen gas at 1 atm. The nitrogen content was measured using the N-14 alpha scattering resonance at 8.81 MeV. For fluences greater than 500 J/cm2, concentrations of nitrogen approaching that of TiN were observed. The thickness of the nitride layer is on the order of 0.35 mum.

引用

页码：454 / 456

页数：3

共 12 条

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