QUANTITATIVE MEASUREMENTS WITH QUADRUPOLE MASS SPECTROMETERS - IMPORTANT SPECIFICATIONS FOR RELIABLE MEASUREMENTS

被引:26
作者
BLEY, WG
机构
[1] Leybold-Heraeus GmbH, Cologne, West Ger, Leybold-Heraeus GmbH, Cologne, West Ger
关键词
GAS ANALYSIS - Instruments - PRESSURE MEASUREMENT;
D O I
10.1016/0042-207X(88)90606-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In recent years, the quadrupole sensor has increasingly been used in new applications far away from vacuum technology, often with the demand for quantitative results. The use of simple, low-cost RGA's for quantitative measurements often yields disappointing results which spoil the reputation of the principle as a quantitative method. Typical classes of quantitative measurements will be listed and correlated with typical specifications of the quadrupole. It will be shown that many practically important quantitative measurements only require a stable instrument. For quantitative analysis of mixtures with strongly varying components a good linearity is additionally required. As a practical example for the quadrupole as a process gas analyzer the PGA 100 from Leybold-Heraeus will be taken. It will be shown that, paying attention to its limits, even a small quadrupole instrument can have the stability and linearity required for reliable quantitative measurements.
引用
收藏
页码:103 / 109
页数:7
相关论文
共 5 条
  • [1] DAWSON PH, 1976, QUADRUPOLE MASS SPEC, P141
  • [2] OTT F, 1986, VIDE COUCHES MINCES, V232
  • [3] DAS ELEKTRISCHE MASSENFILTER ALS MASSENSPEKTROMETER UND ISOTOPENTRENNER
    PAUL, W
    REINHARD, HP
    VONZAHN, U
    [J]. ZEITSCHRIFT FUR PHYSIK, 1958, 152 (02): : 143 - 182
  • [4] MATHEMATICAL TREATMENT OF MASS-SPECTROMETRIC DATA FOR ANALYSIS OF GAS-MIXTURES
    SCHORR, WK
    DUSCHNER, H
    STARKE, K
    [J]. ANALYTICAL CHEMISTRY, 1982, 54 (04) : 671 - 674
  • [5] 15531 LEYB KAT