SHEAR HORIZONTAL ACOUSTIC PLATE MODE VISCOSITY SENSOR

被引:22
作者
SATO, T [1 ]
OKAJIMA, H [1 ]
KASHIWASE, Y [1 ]
MOTEGI, R [1 ]
NAKAJIMA, H [1 ]
机构
[1] TOKYO UNIV AGR & TECHNOL, FAC GEN EDUC, DEPT PHYS, FUCHU, TOKYO 183, JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1993年 / 32卷 / 5B期
关键词
SHEAR HORIZONTAL; ACOUSTIC PLATE MODE; VISCOSITY SENSOR; MODE INTERFERENCE; PERTURBATION THEORY;
D O I
10.1143/JJAP.32.2392
中图分类号
O59 [应用物理学];
学科分类号
摘要
Mode analysis of a LiTaO3 (LTO) plate has been carried out numerically, and an interference-free shear horizontal acoustic plate mode (SH-APM) suitable for measuring the liquid viscosity was found. A viscosity sensor having a liquid container on the side opposite to interdigital transducers (IDTs) was fabricated on X-cut 148-degrees Y-prop LTO. Satisfactory agreement was obtained between the calculated frequency spectrum and the experimental one. A loading test was carried out for a series of Newtonian liquids, which showed good agreement with the perturbation theory.
引用
收藏
页码:2392 / 2395
页数:4
相关论文
共 10 条
[1]  
AULD BA, 1973, ACOUSTIC FIELDS WAVE, V2, P283
[2]   A METHOD FOR ESTIMATING OPTIMAL CRYSTAL CUTS AND PROPAGATION DIRECTIONS FOR EXCITATION OF PIEZOELECTRIC SURFACE WAVES [J].
CAMPBELL, JJ ;
JONES, WR .
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1968, SU15 (04) :209-+
[3]  
HASHIMOTO K, 1988, 1988 P IEEE ULTR S, P97
[4]  
KONDOH J, 1991, US919 I EL INF COMM, P17
[5]  
KUWABARA M, 1990, 1990 SPRING M AC SOC, P757
[6]   CHARACTERIZATION OF SH ACOUSTIC PLATE MODE LIQUID SENSORS [J].
MARTIN, SJ ;
RICCO, AJ ;
NIEMCZYK, TM ;
FRYE, GC .
SENSORS AND ACTUATORS, 1989, 20 (03) :253-268
[7]   LIQUID SENSOR USING 2-PORT SURFACE ACOUSTIC-WAVE RESONATOR [J].
NOMURA, T ;
YASUDA, T ;
FURUKAWA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 :78-81
[8]   ACOUSTIC-WAVE VISCOSITY SENSOR [J].
RICCO, AJ ;
MARTIN, SJ .
APPLIED PHYSICS LETTERS, 1987, 50 (21) :1474-1476
[9]   DESIGN OF SAW SENSOR IN LIQUID [J].
SHIOKAWA, S ;
MORIIZUMI, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1988, 27 :142-144
[10]  
TAKEUCHI T, 1989, 34TH P S PHYS CHEM A, P51