SYNTHESIS AND CHARACTERIZATION OF TIN DIOXIDE POWDERS FOR THE REALIZATION OF THICK-FILM GAS SENSORS

被引：10

作者：

HONORE, M

LENAERTS, S

DESMET, J

HUYBERECHTS, G

ROGGEN, J

机构：

[1] Interuniversity Microelectronics Center, Materials and Packaging Division, Micro-Systems Group, B-3001 Leuven

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1994年 / 19卷 / 1-3期

关键词：

D O I：

10.1016/0925-4005(93)01224-R

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Semiconductor gas sensors produced with screen-printing techniques and based on home-made tin dioxide inks are presented. The ink consists of home-made tin dioxide powder added to a polymer solution to make it screen printable on 96% alumina substrates. The major work is performed on the preparation and the characterization of pure undoped tin dioxide powder produced by two different synthetic pathways. Inks prepared with powders from each method are consecutively handled in an identical way to obtain gas sensors. The sensor response towards different gases is measured and compared for both types of starting materials.

引用

页码：621 / 624

页数：4