NON-CONTACT SURFACE-TEMPERATURE MEASUREMENT DURING REACTIVE-ION ETCHING USING FLUORESCENT POLYMER-FILMS

被引：30

作者：

KOLODNER, P

KATZIR, A

HARTSOUGH, N

机构：

来源：

APPLIED PHYSICS LETTERS | 1983年 / 42卷 / 08期

关键词：

D O I：

10.1063/1.94049

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：749 / 751

页数：3

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