HIGH-PRECISION CAPACITIVE ABSOLUTE PRESSURE SENSOR

[1] PRESSURE SENSITIVITY IN ANISOTROPICALLY ETCHED THIN-DIAPHRAGM PRESSURE SENSORS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) : 1887 - 1896

[2] A SMART DIGITAL-READOUT CIRCUIT FOR A CAPACITIVE MICROTRANSDUCER [J]. IEEE MICRO, 1984, 4 (05) : 44 - 54

[3] HANNEBORG A, 1985, 3RD P INT C SOL STAT, P186

[4] A HIGH-RESOLUTION CAPACITANCE-TO-FREQUENCY CONVERTER [J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1985, 20 (03) : 666 - 670

[5] KUISMA H, 1988, 88 P SENS NUR FRG, P481

[6] RUDOLF F, 1987, 4TH INT C SOL STAT S, P395

[7] OUTGASSING OF GLASS [J]. JOURNAL OF APPLIED PHYSICS, 1955, 26 (10) : 1238 - 1243

[1] PRESSURE SENSITIVITY IN ANISOTROPICALLY ETCHED THIN-DIAPHRAGM PRESSURE SENSORS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) : 1887 - 1896

[2] A SMART DIGITAL-READOUT CIRCUIT FOR A CAPACITIVE MICROTRANSDUCER [J]. IEEE MICRO, 1984, 4 (05) : 44 - 54

[3] HANNEBORG A, 1985, 3RD P INT C SOL STAT, P186

[4] A HIGH-RESOLUTION CAPACITANCE-TO-FREQUENCY CONVERTER [J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1985, 20 (03) : 666 - 670

[5] KUISMA H, 1988, 88 P SENS NUR FRG, P481

[6] RUDOLF F, 1987, 4TH INT C SOL STAT S, P395

[7] OUTGASSING OF GLASS [J]. JOURNAL OF APPLIED PHYSICS, 1955, 26 (10) : 1238 - 1243